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3D view of MEMS electrothermal actuator [1]. A MEMS electrothermal actuator is a microelectromechanical device that typically generates motion by thermal expansion.It relies on the equilibrium between the thermal energy produced by an applied electric current and the heat dissipated into the environment or the substrate.
Sensing: measuring a mechanical input by converting it to an electrical signal, e.g. a MEMS accelerometer or a pressure sensor (could also measure electrical signals as in the case of current sensors) Actuation: using an electrical signal to cause the displacement (or rotation) of a mechanical structure, e.g. a synthetic jet actuator.
A capacitive MEMS switch is developed using a moving plate or sensing element, which changes the capacitance. [10] Ohmic switches are controlled by electrostatically controlled cantilevers. [11] Ohmic MEMS switches can fail from metal fatigue of the MEMS actuator (cantilever) and contact wear, since cantilevers can deform over time. [12]
Comb drive actuators typically operate at the micro- or nanometer scale and are generally manufactured by bulk micromachining or surface micromachining a silicon wafer substrate. The attractive electrostatic forces are created when a voltage is applied between the static and moving combs causing them to be drawn together. The force developed by ...
It can also cause large deflection on thin membranes. Electrostatic-pneumatic MEMS devices usually consist of two membranes with a sealed cavity in between. One membrane-calling actuator deflects into the cavity by electrostatic pressure to compress air and increase air pressure. Elevated pressure pushes the other membrane and causes a dome shape.
The field competes with a restoring force on the rotor (normally a spring force produced by the bending or stretching of the rotor) to move it. The greater the electric field, the further the rotor will move. Thermal actuators use the force of thermal expansion to move objects. When a material is heated, it expands an amount depending on ...
Such self-powered schemes are particularly beneficial in development of self-powered sensors [10] and self-powered actuators [11] by employing energy harvesting techniques, [12] [13] [14] where kinetic energy is converted to electrical energy through piezoelectric, electromagnetic or electrostatic electromechanical mechanisms. [15]
NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators, pumps, or motors, and may thereby form physical, biological, and chemical sensors.