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  2. Radio-frequency microelectromechanical system - Wikipedia

    en.wikipedia.org/wiki/Radio-frequency_micro...

    The prior art includes an RF MEMS frequency tunable fractal antenna for the 0.1–6 GHz frequency range, [18] and the actual integration of RF MEMS switches on a self-similar Sierpinski gasket antenna to increase its number of resonant frequencies, extending its range to 8 GHz, 14 GHz and 25 GHz, [19] [20] an RF MEMS radiation pattern ...

  3. Microoptoelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Microoptoelectromechanical...

    In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego. In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major ...

  4. MEMS - Wikipedia

    en.wikipedia.org/wiki/MEMS

    An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.

  5. Microelectromechanical system oscillator - Wikipedia

    en.wikipedia.org/wiki/Microelectromechanical...

    MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.

  6. Microfabrication - Wikipedia

    en.wikipedia.org/wiki/Microfabrication

    Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades, microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields have re ...

  7. Nanoelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Nanoelectromechanical_systems

    NEMS form the next logical miniaturization step from so-called microelectromechanical systems, or MEMS devices. NEMS typically integrate transistor-like nanoelectronics with mechanical actuators , pumps, or motors, and may thereby form physical, biological, and chemical sensors .

  8. University of Virginia School of Engineering and Applied Science

    en.wikipedia.org/wiki/University_of_Virginia...

    Along with providing many of the foundational courses in the School's curriculum, E&S is responsible for the following programs for undergraduates: the undergraduate thesis, the Washington, D.C. Science and Technology Policy Internship, Rodman Scholars, international studies, online courses, and hands-on activities such as the electric vehicle ...

  9. MEMS magnetic actuator - Wikipedia

    en.wikipedia.org/wiki/MEMS_Magnetic_Actuator

    A MEMS magnetic actuator is a device that uses the microelectromechanical systems (MEMS) to convert an electric current into a mechanical output by employing the well-known Lorentz Force Equation or the theory of Magnetism.