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RF MEMS resonators offer the potential of on-chip integration of high-Q resonators and low-loss bandpass filters. The Q factor of RF MEMS resonators is in the order of 100–1000. [ 15 ] RF MEMS switch, switched capacitor and varactor technology, offers the tunable filter designer a compelling trade-off between insertion loss, linearity, power ...
MEMS resonators have operated at over a gigahertz. [61] Common bells are mechanically struck, while MEMS resonators are electrically driven. There are two base technologies used to build MEMS resonators that differ in how electrical drive and sense signals are transduced from the mechanical motion. These are electrostatic and piezoelectric. All ...
The cavities serve as resonators (tank circuits) to determine the frequency of the oscillators. A microwave cavity or radio frequency cavity (RF cavity) is a special type of resonator, consisting of a closed (or largely closed) metal structure that confines electromagnetic fields in the microwave or RF region of the spectrum.
A resonator is a device or system that exhibits resonance or resonant behavior. That is, it naturally oscillates with greater amplitude at some frequencies, called resonant frequencies, than at other frequencies. The oscillations in a resonator can be either electromagnetic or mechanical (including acoustic). Resonators are used to either ...
In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego. In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major ...
The ultra-low electrical resistivity of a superconducting material allows an RF resonator to obtain an extremely high quality factor, Q. For example, it is commonplace for a 1.3 GHz niobium SRF resonant cavity at 1.8 kelvins to obtain a quality factor of Q=5×10 10. Such a very high Q resonator stores energy with very low loss and narrow bandwidth.
The simplest resonator structure that can be used in rf and microwave filters is an LC tank circuit consisting of parallel or series inductors and capacitors. These have the advantage of being very compact, but the low quality factor of the resonators leads to relatively poor performance.
The first reported piezoelectrically actuated RF MEMS switch was developed by scientists at the LG Electronics Institute of Technology in Seoul, South Korea in 2005. [3] The researchers designed and actualized a RF MEMS switch with a piezoelectric cantilever actuator that had an operation voltage of 2.5 volts. [7]