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Vertical furnaces solve this problem by having wafer sitting horizontally, and then having the gas flow in the furnace flowing from top to bottom, significantly damping any thermal convections. Vertical furnaces also allow the use of load locks to purge the wafers with nitrogen before oxidation to limit the growth of native oxide on the Si surface.
Dust deposition by thermophoresis. Thermophoresis (also thermomigration, thermodiffusion, the Soret effect, or the Ludwig–Soret effect) is a phenomenon observed in mixtures of mobile particles where the different particle types exhibit different responses to the force of a temperature gradient.
A thermal force on a gas due to a temperature gradient, also called thermal diffusion or Thermal transpiration. It is used to drive a gas pump with no moving parts called a Knudsen pump. It is the currently accepted theory for the rotation of the Crookes radiometer. Diffusion in a temperature gradient, also called thermodiffusion or thermophoresis.
The typical efficiency of TEGs is around 5–8%, although it can be higher. Older devices used bimetallic junctions and were bulky. More recent devices use highly doped semiconductors made from bismuth telluride (Bi 2 Te 3), lead telluride (PbTe), [10] calcium manganese oxide (Ca 2 Mn 3 O 8), [11] [12] or combinations thereof, [13] depending on application temperature.
Thermal diffusivity of selected materials and substances [12]; Material Thermal diffusivity (mm 2 /s) Refs. Pyrolytic graphite, parallel to layers: 1,220: Diamond: 1,060–1,160: Carbon/carbon composite at 25 °C
ASM's products are used by semiconductor manufacturers in front-end wafer processing in their semiconductor fabrication plants. ASM's technologies include atomic layer deposition, epitaxy, chemical vapor deposition and diffusion. [1] The company was founded by Arthur del Prado (1931-2016) as 'Advanced Semiconductor Materials' in 1964. [2]