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The base pressure of a rubber- and plastic-sealed piston pump system is typically 1 to 50 kPa, while a scroll pump might reach 10 Pa (when new) and a rotary vane oil pump with a clean and empty metallic chamber can easily achieve 0.1 Pa.
The term "roughing pump" derives from the vacuum range it works in, "rough vacuum", above 1x10 −3 torr (0.1 Pa). Pumps that operate in the high vacuum ranges typically don't operate, or only operate inefficiently, at atmospheric pressures , whereas pumps that work efficiently at atmospheric pressure usually cannot produce a vacuum lower than ...
Interior view of a turbomolecular pump. A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [1] [2] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
There is no single vacuum pump that can operate all the way from atmospheric pressure to ultra-high vacuum. Instead, a series of different pumps is used, according to the appropriate pressure range for each pump. In the first stage, a roughing pump clears most of the gas from the chamber. This is followed by one or more vacuum pumps that ...
An oil diffusion pump is used to achieve higher vacuum (lower pressure) than is possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high-vacuum range, down to 1 × 10 −9 mbar (1 × 10 −7 Pa), diffusion pumps today can produce pressures approaching 1 × 10 −10 mbar (1 × 10 −8 Pa) when properly used with modern fluids and accessories.
Pressure can be achieved by elaborate materials (e.g. stainless steel) and positive displacement vacuum pumps; transitional flow regime for gases <0.1 Pa to 1 × 10 −6 Pa: high vacuum (HV) Pressure can be achieved by elaborate materials (e.g. stainless steel), elastomer sealings and high vacuum pumps; molecular flow regime for gases
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Furthermore, vane pumps can be used in low-pressure gas applications such as secondary air injection for auto exhaust emission control, or in low-pressure chemical vapor deposition systems [citation needed]. Rotary-vane pumps are also a common type of vacuum pump, with two-stage pumps able to reach pressures well below 10 −6 bar.