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Figure 1: Schematic layout of a White-light Interferometer. A CCD image sensor like those used for digital photography is placed at the point where the two images are superimposed. A broadband “white light” source is used to illuminate the test and reference surfaces. A condenser lens collimates the light from the broadband light source.
Figure 3. White light interferometric microscope. White-light interferometry scanning (WLS) systems capture intensity data at a series of positions along the vertical axis, determining where the surface is located by using the shape of the white-light interferogram, the localized phase of the interferogram, or a combination of both shape and phase.
The fact that these sensors have no moving parts allows for very high scan speeds and makes them very repeatable. Configurations with a high numerical aperture can measure on relatively steep flanks. Multiple sensors, with the same or different measurement ranges, can be used simultaneously, allowing differential measurement approaches (TTV) or ...
White light interferometry is commonly used for detecting deformations of the wafer surface based on optical measurements. Low-coherence light from a white light source passes through the optical top wafer, e.g. glass wafer, to the bond interface. Usually there are three different white light interferometers: diffraction grating interferometers
Diffraction-grating interferometer (white light) Double-slit interferometer; Dual-polarization interferometry; Fabry–Pérot interferometer; Fizeau interferometer; Fourier-transform interferometer; Fresnel interferometer (e.g. Fresnel biprism, Fresnel mirror or Lloyd's mirror) Fringes of Equal Chromatic Order interferometer (FECO) Gabor hologram
There are many different techniques which are currently being employed, such as laser triangulation (triangulation sensor), confocal microscopy (used for profiling very small objects), coherence scanning interferometry, and digital holography. Advantages of optical profilometers are speed, reliability and spot size.
Figure 1. The light path through a Michelson interferometer.The two light rays with a common source combine at the half-silvered mirror to reach the detector. They may either interfere constructively (strengthening in intensity) if their light waves arrive in phase, or interfere destructively (weakening in intensity) if they arrive out of phase, depending on the exact distances between the ...
Compared to 3D laser scanning, structured-light scanners can offer advantages in speed and safety by using non-coherent light sources like LEDs or projectors instead of lasers. This approach allows for relatively quick data capture over large areas and reduces potential safety concerns associated with laser use.