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Areal roughness parameters are defined in the ISO 25178 series. The resulting values are Sa, Sq, Sz,... Many optical measurement instruments are able to measure the surface roughness over an area. Area measurements are also possible with contact measurement systems. Multiple, closely spaced 2D scans are taken of the target area.
It is the first international standard taking into account the specification and measurement of 3D surface texture. ... a surface data set for roughness measurement.
As is the case with all optical techniques, the interaction of light with the sample for this instruments is not fully understood. This means that measurement errors can occur especially for roughness measurement. [4] [5] Digital Holography: this method provides 3D topography with a similar resolution as interferometry.
For small steps and requirements to do 3D scanning, because the non-contact profilometer does not touch the surface the scan speeds are dictated by the light reflected from the surface and the speed of the acquisition electronics. For doing large steps, a 3D scan on an optical profiler can be much slower than a 2D scan on a stylus profiler.
The interference occurs for white light when the path lengths of the measurement beam and the reference beam are nearly matched. By scanning (changing) the measurement beam path length relative to the reference beam, a correlogram is generated at each pixel. The width of the resulting correlogram is the coherence length, which depends strongly ...
[7] [8] [9] Industrial applications include in-process surface metrology, roughness measurement, 3D surface metrology in hard-to-reach spaces and in hostile environments, profilometry of surfaces with high aspect ratio features (grooves, channels, holes), and film thickness measurement (semi-conductor and optical industries, etc.). [10]
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