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A white light scanner (WLS) is a device for performing surface height measurements of an object using coherence scanning interferometry with spectrally-broadband, "white light" illumination. Different configurations of scanning interferometer may be used to measure macroscopic objects with surface profiles measuring in the centimeter range, to ...
Novacam's fiber-based optical profilometers and Optical Coherence Tomography (OCT) systems are based on low coherence interferometry. The fiber-based nature of Novacam's detector probes is unique in the optical metrology industry. [1] [2] [3] Novacam is a privately owned Canadian company that makes precision optical measuring instruments.
Surface metrology is the measurement of small-scale features on surfaces, and is a branch of metrology.Surface primary form, surface fractality, and surface finish (including surface roughness) are the parameters most commonly associated with the field.
Areal roughness parameters are defined in the ISO 25178 series. The resulting values are Sa, Sq, Sz,... Many optical measurement instruments are able to measure the surface roughness over an area. Area measurements are also possible with contact measurement systems. Multiple, closely spaced 2D scans are taken of the target area.
The interference occurs for white light when the path lengths of the measurement beam and the reference beam are nearly matched. By scanning (changing) the measurement beam path length relative to the reference beam, a correlogram is generated at each pixel. The width of the resulting correlogram is the coherence length, which depends strongly ...
A profilometer is a measuring instrument used to measure a surface's profile, in order to quantify its roughness. Critical dimensions as step, curvature, flatness are computed from the surface topography.
Surface roughness, commonly shortened to roughness, is a measure of the total spaced surface irregularities. [1] In engineering, this is what is usually meant by "surface finish." A Lower number constitutes finer irregularities, i.e., a smoother surface.
Part 606 describes this type of non-contact areal based method. The operating principle is based on a microscope optics with limited depth of field and a CCD camera. By scanning in vertical direction several images with different focus are gathered. This data is then used to calculate a surface data set for roughness measurement.