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RF MEMS switched capacitors are capacitive fixed-fixed beam switches with a low capacitance ratio. RF MEMS varactors are capacitive fixed-fixed beam switches which are biased below pull-in voltage. Other examples of RF MEMS switches are ohmic cantilever switches, and capacitive single pole N throw (SPNT) switches based on the axial gap wobble ...
A digitally tuned capacitor is an IC variable capacitor based on several technologies. MEMS , BST and SOI / SOS devices are available from a number of suppliers and vary in capacitance range, quality factor and resolution for different RF tuning applications.
A MEMS magnetic field sensor is a small-scale microelectromechanical systems (MEMS) device for detecting and measuring magnetic fields (magnetometer). Many of these operate by detecting effects of the Lorentz force : a change in voltage or resonant frequency may be measured electronically, or a mechanical displacement may be measured optically.
In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego. In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major ...
An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.
MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.
Some accelerometers use microelectromechanical systems (MEMS) capacitors etched on a chip to measure the magnitude and direction of the acceleration vector. They are used to detect changes in acceleration, e.g. as tilt sensors or to detect free fall, as sensors triggering airbag deployment, and in many other applications.
The MEMS (microelectromechanical systems) microphone is also called a microphone chip or silicon microphone. A pressure-sensitive diaphragm is etched directly into a silicon wafer by MEMS processing techniques and is usually accompanied with an integrated preamplifier. [35] Most MEMS microphones are variants of the condenser microphone design.