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A MEMS magnetic actuator is a device that uses the microelectromechanical systems ... electrostatic, piezoresistive, electrodynamic, magnetic and magnetostrictive ...
It can also cause large deflection on thin membranes. Electrostatic-pneumatic MEMS devices usually consist of two membranes with a sealed cavity in between. One membrane-calling actuator deflects into the cavity by electrostatic pressure to compress air and increase air pressure. Elevated pressure pushes the other membrane and causes a dome shape.
3D view of MEMS electrothermal actuator [1]. A MEMS electrothermal actuator is a microelectromechanical device that typically generates motion by thermal expansion.It relies on the equilibrium between the thermal energy produced by an applied electric current and the heat dissipated into the environment or the substrate.
Comb drive actuators typically operate at the micro- or nanometer scale and are generally manufactured by bulk micromachining or surface micromachining a silicon wafer substrate. The attractive electrostatic forces are created when a voltage is applied between the static and moving combs causing them to be drawn together. The force developed by ...
A capacitive MEMS switch is developed using a moving plate or sensing element, which changes the capacitance. [10] Ohmic switches are controlled by electrostatically controlled cantilevers. [11] Ohmic MEMS switches can fail from metal fatigue of the MEMS actuator (cantilever) and contact wear, since cantilevers can deform over time. [12]
MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.