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Part 606 describes this type of non-contact areal based method. The operating principle is based on a microscope optics with limited depth of field and a CCD camera. By scanning in vertical direction several images with different focus are gathered. This data is then used to calculate a surface data set for roughness measurement.
Areal roughness parameters are defined in the ISO 25178 series. The resulting values are Sa, Sq, Sz,... Many optical measurement instruments are able to measure the surface roughness over an area. Area measurements are also possible with contact measurement systems. Multiple, closely spaced 2D scans are taken of the target area.
The scale of the desired measurement will help decide which type of microscope will be used. For 3D measurements, the probe is commanded to scan over a 2D area on the surface. The spacing between data points may not be the same in both directions. In some cases, the physics of the measuring instrument may have a large effect on the data.
The interference occurs for white light when the path lengths of the measurement beam and the reference beam are nearly matched. By scanning (changing) the measurement beam path length relative to the reference beam, a correlogram is generated at each pixel. The width of the resulting correlogram is the coherence length, which depends strongly ...
For small steps and requirements to do 3D scanning, because the non-contact profilometer does not touch the surface the scan speeds are dictated by the light reflected from the surface and the speed of the acquisition electronics. For doing large steps, a 3D scan on an optical profiler can be much slower than a 2D scan on a stylus profiler.
Skin surface measurement for cosmetics and medicine; Body shape measurement; Forensic science inspections; Road pavement structure and roughness; Wrinkle measurement on cloth and leather; Structured Illumination Microscopy; Measurement of topography of solar cells [9] 3D vision system enables DHL's e-fulfillment robot [10]
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