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  2. Etching (microfabrication) - Wikipedia

    en.wikipedia.org/wiki/Etching_(microfabrication)

    Etching is a critically important process module in fabrication, and every wafer undergoes many etching steps before it is complete. For many etch steps, part of the wafer is protected from the etchant by a "masking" material which resists etching. In some cases, the masking material is a photoresist which has been patterned using photolithography.

  3. Plasma etching - Wikipedia

    en.wikipedia.org/wiki/Plasma_etching

    The dry etch is then performed so that structured etching is achieved. After the process, the remaining photoresist has to be removed. This is also done in a special plasma etcher, called an asher. [14] Dry etching allows a reproducible, uniform etching of all materials used in silicon and III-V semiconductor technology. By using inductively ...

  4. Semiconductor device fabrication - Wikipedia

    en.wikipedia.org/wiki/Semiconductor_device...

    Early semiconductor processes had arbitrary names for generations (viz., HMOS I/II/III/IV and CHMOS III/III-E/IV/V). Later each new generation process became known as a technology node [17] or process node, [18] [19] designated by the process' minimum feature size in nanometers (or historically micrometers) of the process's transistor gate ...

  5. Indium gallium arsenide - Wikipedia

    en.wikipedia.org/wiki/Indium_gallium_arsenide

    Indium and gallium are group III elements of the periodic table while arsenic is a group V element. Alloys made of these chemical groups are referred to as "III-V" compounds. InGaAs has properties intermediate between those of GaAs and InAs. InGaAs is a room-temperature semiconductor with applications in electronics and photonics.

  6. etching (etch, etch processing) – chemically removing layers from the surface of a wafer during semiconductor device fabrication fab – a semiconductor fabrication plant fan-out wafer-level packaging – an extension of wafer-level packaging in which the wafer is diced, dies are positioned on a carrier wafer and molded, and then a ...

  7. List of semiconductor scale examples - Wikipedia

    en.wikipedia.org/wiki/List_of_semiconductor...

    Fujitsu SPARC64 V – 2001 [102] Gekko by IBM and Nintendo (GameCube console) – 2001; Motorola PowerPC 7447 and 7457 – 2002; IBM PowerPC G5 970 – October 2002 – June 2003; Intel Pentium III Tualatin and Coppermine – 2001-04; Intel Celeron Tualatin-256 – 2001-10-02; Intel Pentium M Banias – 2003-03-12; Intel Pentium 4 Northwood ...

  8. Deep reactive-ion etching - Wikipedia

    en.wikipedia.org/wiki/Deep_reactive-ion_etching

    Deep reactive-ion etching (DRIE) is a special subclass of reactive-ion etching (RIE). It enables highly anisotropic etch process used to create deep penetration, steep-sided holes and trenches in wafers /substrates, typically with high aspect ratios .

  9. Category:III-V semiconductors - Wikipedia

    en.wikipedia.org/wiki/Category:III-V_semiconductors

    A III-V compound semiconductor is an alloy that contains elements from group III and group V of the periodic table. [1 Pages in category "III-V semiconductors" ...