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RF MEMS resonators offer the potential of on-chip integration of high-Q resonators and low-loss bandpass filters. The Q factor of RF MEMS resonators is in the order of 100–1000. [ 15 ] RF MEMS switch, switched capacitor and varactor technology, offers the tunable filter designer a compelling trade-off between insertion loss, linearity, power ...
MEMS resonators have operated at over a gigahertz. [61] Common bells are mechanically struck, while MEMS resonators are electrically driven. There are two base technologies used to build MEMS resonators that differ in how electrical drive and sense signals are transduced from the mechanical motion. These are electrostatic and piezoelectric. All ...
The cavities serve as resonators (tank circuits) to determine the frequency of the oscillators. A microwave cavity or radio frequency cavity (RF cavity) is a special type of resonator, consisting of a closed (or largely closed) metal structure that confines electromagnetic fields in the microwave or RF region of the spectrum.
A resonator is a device or system that exhibits resonance or resonant behavior. That is, it naturally oscillates with greater amplitude at some frequencies, called resonant frequencies, than at other frequencies. The oscillations in a resonator can be either electromagnetic or mechanical (including acoustic). Resonators are used to either ...
In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego. In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major ...
Radio frequency (RF) and microwave filters represent a class of electronic filter, designed to operate on signals in the megahertz to gigahertz frequency ranges (medium frequency to extremely high frequency). It is component that is used in electronic systems to pass or reject specific frequencies and attenuate of unwanted signals within the ...
The Q factor is a parameter that describes the resonance behavior of an underdamped harmonic oscillator (resonator). Sinusoidally driven resonators having higher Q factors resonate with greater amplitudes (at the resonant frequency) but have a smaller range of frequencies around that frequency for which they resonate; the range of frequencies for which the oscillator resonates is called the ...
The ultra-low electrical resistivity of a superconducting material allows an RF resonator to obtain an extremely high quality factor, Q. For example, it is commonplace for a 1.3 GHz niobium SRF resonant cavity at 1.8 kelvins to obtain a quality factor of Q=5×10 10. Such a very high Q resonator stores energy with very low loss and narrow bandwidth.