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An oil diffusion pump is used to achieve higher vacuum (lower pressure) than is possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high-vacuum range, down to 1 × 10 −9 mbar (1 × 10 −7 Pa), diffusion pumps today can produce pressures approaching 1 × 10 −10 mbar (1 × 10 −8 Pa) when properly used with modern fluids and accessories.
Interior view of a turbomolecular pump. A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [1] [2] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
Ion pumps; Titanium sublimation pumps; Non-evaporable getter (NEG) pumps; Cryopumps; Diffusion pumps, especially when used with a cryogenic trap designed to minimize backstreaming of pump oil into the systems. Turbo pumps and diffusion pumps rely on supersonic attack upon system molecules by the blades and high speed vapor stream, respectively.
This is the principle behind a positive displacement pump, for example the manual water pump. Inside the pump, a mechanism expands a small sealed cavity to reduce its pressure below that of the atmosphere. Because of the pressure differential, some fluid from the chamber (or the well, in our example) is pushed into the pump's small cavity.
A noble diode pump is a type of ion pump used in high-vacuum applications that employs both a chemically reactive cathode, such as titanium, and an additional cathode composed of tantalum. The tantalum cathode serves as a high-inertia crystal lattice structure for the reflection and burial of neutrals, increasing pumping effectiveness of inert ...
An eccentric rotary vane pump Another eccentric rotary-vane pump design. Note that modern pumps have an area contact between rotor and stator (and not a line contact). 1. pump housing 2. rotor 3. vanes 4. spring. A rotary vane pump is a type of positive-displacement pump that consists of vanes mounted to a rotor that rotates inside a cavity. In ...
In an ejector, a working fluid (liquid or gaseous) flows through a jet nozzle into a tube that first narrows and then expands in cross-sectional area. The fluid leaving the jet is flowing at a high velocity which due to Bernoulli's principle results in it having low pressure, thus generating a vacuum. The outer tube then narrows into a mixing ...
A molecular drag pump is a type of vacuum pump that utilizes the drag of air molecules against a rotating surface. [1] The most common sub-type is the Holweck pump, which contains a rotating cylinder with spiral grooves which direct the gas from the high vacuum side of the pump to the low vacuum side of the pump. [2]