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Many types of sensors use capacitive sensing, including sensors to detect and measure proximity, pressure, position and displacement, force, humidity, fluid level, and acceleration. Human interface devices based on capacitive sensing, such as touchpads , [ 1 ] can replace the computer mouse .
Different proximity sensor targets demand different sensors. For example, a capacitive proximity sensor or photoelectric sensor might be suitable for a plastic target; an inductive proximity sensor always requires a metal target. [citation needed] Proximity sensors can have a high reliability and long functional life because of the absence of ...
14 Proximity, presence. 15 Sensor technology. 16 Speed sensor. 17 Others. 18 References. ... Capacitive displacement sensor; Capacitive sensing; Displacement sensor ...
Capacitive displacement sensors can be used to measure the position of objects down to the nanometer level. This type of precise positioning is used in the semiconductor industry where silicon wafers need to be positioned for exposure. Capacitive sensors are also used to pre-focus the electron microscopes used in testing and examining the wafers.
However, mutual capacitance also has its limitations, such as its measurement noise being generally greater than self-capacitance. Capacitance switches are available commercially as integrated circuits from a number of manufacturers. These devices can also be used as a short-range proximity sensor.
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