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A vacuum chamber is a rigid enclosure from which air and other gases are removed by a vacuum pump. This results in a low- pressure environment within the chamber, commonly referred to as a vacuum . A vacuum environment allows researchers to conduct physical experiments or to test mechanical devices which must operate in outer space (for example ...
Interior view of a turbomolecular pump. A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [1] [2] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
Edwards' IPUP2 Vacuum Pump Sets New Standards for Load Lock and Transfer Chamber Applications Advanced design of 2 nd generation pump achieves early success. CRAWLEY, England--(BUSINESS WIRE ...
Instead, a series of different pumps is used, according to the appropriate pressure range for each pump. In the first stage, a roughing pump clears most of the gas from the chamber. This is followed by one or more vacuum pumps that operate at low pressures. Pumps commonly used in this second stage to achieve UHV include: Turbomolecular pumps ...
Vacuum pumps are combined with chambers and operational procedures into a wide variety of vacuum systems. Sometimes more than one pump will be used (in series or in parallel) in a single application. A partial vacuum, or rough vacuum, can be created using a positive displacement pump that transports a gas load from an inlet port to an outlet ...
The term "roughing pump" derives from the vacuum range it works in, "rough vacuum", above 1x10 −3 torr (0.1 Pa). Pumps that operate in the high vacuum ranges typically don't operate, or only operate inefficiently, at atmospheric pressures , whereas pumps that work efficiently at atmospheric pressure usually cannot produce a vacuum lower than ...
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