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Areal roughness parameters are defined in the ISO 25178 series. The resulting values are Sa, Sq, Sz,... Many optical measurement instruments are able to measure the surface roughness over an area. Area measurements are also possible with contact measurement systems. Multiple, closely spaced 2D scans are taken of the target area.
Part 606 describes this type of non-contact areal based method. The operating principle is based on a microscope optics with limited depth of field and a CCD camera. By scanning in vertical direction several images with different focus are gathered. This data is then used to calculate a surface data set for roughness measurement.
Version 7.4 (January 2017) offers 3D reconstruction from a single SEM image, and enhanced 3D printing [24] Version 8.0 (June 2019) is the successor of both Mountains 7.4 and SPIP 6.7 software packages ("SPIP" standing for "Scanning Probe Image Processor") after the acquisition by Digital Surf of the Danish company Image Metrology A/S, the ...
As is the case with all optical techniques, the interaction of light with the sample for this instruments is not fully understood. This means that measurement errors can occur especially for roughness measurement. [4] [5] Digital Holography: this method provides 3D topography with a similar resolution as interferometry.
For small steps and requirements to do 3D scanning, because the non-contact profilometer does not touch the surface the scan speeds are dictated by the light reflected from the surface and the speed of the acquisition electronics. For doing large steps, a 3D scan on an optical profiler can be much slower than a 2D scan on a stylus profiler.
The interference occurs for white light when the path lengths of the measurement beam and the reference beam are nearly matched. By scanning (changing) the measurement beam path length relative to the reference beam, a correlogram is generated at each pixel. The width of the resulting correlogram is the coherence length, which depends strongly ...
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