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  2. MEMS magnetic actuator - Wikipedia

    en.wikipedia.org/wiki/MEMS_Magnetic_Actuator

    A MEMS magnetic actuator is a device that uses the microelectromechanical systems (MEMS) to convert an electric current into a mechanical output by employing the well-known Lorentz Force Equation or the theory of Magnetism.

  3. MEMS magnetic field sensor - Wikipedia

    en.wikipedia.org/wiki/MEMS_magnetic_field_sensor

    A MEMS magnetic field sensor is a small-scale microelectromechanical systems (MEMS) device for detecting and measuring magnetic fields (magnetometer). Many of these operate by detecting effects of the Lorentz force : a change in voltage or resonant frequency may be measured electronically, or a mechanical displacement may be measured optically.

  4. MEMS - Wikipedia

    en.wikipedia.org/wiki/MEMS

    MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm 2. [1]

  5. Piezoelectric micromachined ultrasonic transducer - Wikipedia

    en.wikipedia.org/wiki/Piezoelectric_micro...

    Piezoelectric micromachined ultrasonic transducers (PMUT) are MEMS-based piezoelectric ultrasonic transducers.Unlike bulk piezoelectric transducers which use the thickness-mode motion of a plate of piezoelectric ceramic such as PZT or single-crystal PMN-PT, PMUT are based on the flexural motion of a thin membrane coupled with a thin piezoelectric film, such as PVDF.

  6. Piezoelectric microelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Piezoelectric_micro...

    The first reported piezoelectrically actuated RF MEMS switch was developed by scientists at the LG Electronics Institute of Technology in Seoul, South Korea in 2005. [3] The researchers designed and actualized a RF MEMS switch with a piezoelectric cantilever actuator that had an operation voltage of 2.5 volts. [7]

  7. Surface acoustic wave sensor - Wikipedia

    en.wikipedia.org/wiki/Surface_acoustic_wave_sensor

    Surface acoustic wave sensors are a class of microelectromechanical systems (MEMS) which rely on the modulation of surface acoustic waves to sense a physical phenomenon. The sensor transduces an input electrical signal into a mechanical wave which, unlike an electrical signal, can be easily influenced by physical phenomena.

  8. List of MEMS foundries - Wikipedia

    en.wikipedia.org/wiki/List_of_MEMS_foundries

    MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones) Silicon High volume production IDM Switzerland: Teledyne DALSA: MEMS design and manufacturing with integration of individual foundry processes Silicon and polysilicon High volume production 6, 8 Pure-play Canada

  9. List of MOSFET applications - Wikipedia

    en.wikipedia.org/wiki/List_of_MOSFET_applications

    MOSFETs are also widely used in microelectromechanical systems (MEMS), as silicon MOSFETs could interact and communicate with the surroundings and process things such as chemicals, motions and light. [77] An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Harvey C. Nathanson in 1965. [78]

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