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  2. MEMS - Wikipedia

    en.wikipedia.org/wiki/MEMS

    One of the basic building blocks in MEMS processing is the ability to deposit thin films of material with a thickness anywhere from one micrometre to about 100 micrometres. The NEMS process is the same, although the measurement of film deposition ranges from a few nanometres to one micrometre. There are two types of deposition processes, as ...

  3. Radio-frequency microelectromechanical system - Wikipedia

    en.wikipedia.org/wiki/Radio-frequency_micro...

    The prior art includes an RF MEMS frequency tunable fractal antenna for the 0.1–6 GHz frequency range, [18] and the actual integration of RF MEMS switches on a self-similar Sierpinski gasket antenna to increase its number of resonant frequencies, extending its range to 8 GHz, 14 GHz and 25 GHz, [19] [20] an RF MEMS radiation pattern ...

  4. Nanoelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Nanoelectromechanical_systems

    This is a useful property as wires to transfer current are another basic building block of any electrical system. Carbon nanotubes have specifically found so much use in NEMS that methods have already been discovered to connect suspended carbon nanotubes to other nanostructures. [29]

  5. Microelectromechanical system oscillator - Wikipedia

    en.wikipedia.org/wiki/Microelectromechanical...

    MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.

  6. Microoptoelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Microoptoelectromechanical...

    In 1993, Dr. Motamedi officially introduced MOEMS for the first time, as the powerful combination of MEMS and micro-optics, in an invited talk at the SPIE Critical Reviews of Optical Science and Technology conference in San Diego. In this talk Dr. Motamedi introduced the figure below, for showing that MOEMS is the interaction of three major ...

  7. MEMS for in situ mechanical characterization - Wikipedia

    en.wikipedia.org/wiki/MEMS_for_in_situ...

    Most of the current focus in the developing of MEMS for in situ testing lies in this area with examples from Haque, Espinosa and Zhang. [18] On the other hand, given that MEMS has demonstrated to be a feasible technology for characterizing mechanical properties at the nanoscale, application of the technology to other types of problems has been ...

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  9. Piezoelectric microelectromechanical systems - Wikipedia

    en.wikipedia.org/wiki/Piezoelectric_micro...

    The first reported piezoelectrically actuated RF MEMS switch was developed by scientists at the LG Electronics Institute of Technology in Seoul, South Korea in 2005. [3] The researchers designed and actualized a RF MEMS switch with a piezoelectric cantilever actuator that had an operation voltage of 2.5 volts. [7]