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A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [ 1 ] [ 2 ] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
Edwards Ltd is a British multinational vacuum pump and exhaust gas management systems manufacturer. Its headquarters are in Burgess Hill , UK, and has been part of the Atlas Copco Group since 2014. [ 12 ] [ 13 ] [ 1 ] Edwards holds 1,700 patents , including for dry (oil-free) vacuum pumps , and produces equipment used for manufacturing ...
The turbomolecular pump overcame many of these disadvantages. Many modern turbomolecular pumps contain built-in molecular drag stages, which allows them to operate at higher foreline pressures. As a stage in turbo molecular pumps, the most widely used design is the Holweck type, due to a significantly higher pumping speed than the Gaede design.
Samples may become contaminated by titanium if they have line-of-sight to the pump. Also, titanium is a very hard material, so titanium film which builds up on the inside of the chamber may form flakes which fall into mechanical components (typically turbomolecular pumps and valves) and damage them. Many chambers containing TSPs also have an ...
The two main types of molecular pumps are the diffusion pump and the turbomolecular pump. Both types of pumps blow out gas molecules that diffuse into the pump by imparting momentum to the gas molecules. Diffusion pumps blow out gas molecules with jets of an oil or mercury vapor, while turbomolecular pumps use high speed fans to push the gas.
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