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A microlens array used in a spectrograph. A microlens is a small lens, generally with a diameter less than a millimetre (mm) and often as small as 10 micrometres (μm). The small sizes of the lenses means that a simple design can give good optical quality but sometimes unwanted effects arise due to optical diffraction at the small features.
In immersion lithography, light travels down through a system of lenses and then a pool of water before reaching the photoresist on top of the wafer.. Immersion lithography is a technique used in semiconductor manufacturing to enhance the resolution and accuracy of the lithographic process.
The wafer can undergo a dehydration bake to remove adsorbed water, and followed by the HMDS treatment also known as the priming stage. HMDS can be dispensed in liquid form onto the wafer using a syringe while the wafer is attached to a vacuum chuck in a spin coater. HMDS can also be applied in gas form in the process known as the vapor prime.
The root words photo, litho, and graphy all have Greek origins, with the meanings 'light', 'stone' and 'writing' respectively. As suggested by the name compounded from them, photolithography is a printing method (originally based on the use of limestone printing plates) in which light plays an essential role.
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Immersion lithography places a layer of pure water between the projection lens and the wafer. Any contaminant within the water can lead to change in refractive index and a project defect on the wafer. Micro-bubbles in the water can also lead to project defects on the wafer. Water vapor also plays an important role in Carbon NanoTube (CNT ...