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  2. RCA clean - Wikipedia

    en.wikipedia.org/wiki/RCA_clean

    The RCA clean is a standard set of wafer cleaning steps which need to be performed before high-temperature processing steps (oxidation, diffusion, CVD) of silicon wafers in semiconductor manufacturing. Werner Kern developed the basic procedure in 1965 while working for RCA, the Radio Corporation of America.

  3. SMIF (interface) - Wikipedia

    en.wikipedia.org/wiki/SMIF_(interface)

    SMIF POD for 6" wafers. SMIF (Standard Mechanical Interface) is a wafer carrier used in semiconductor wafer fabrication and cleanroom environments. The isolation technology was developed in the 1980s by a group known as the "micronauts" at Hewlett-Packard in Palo Alto. It is a SEMI standard. [1]

  4. Semiconductor device fabrication - Wikipedia

    en.wikipedia.org/wiki/Semiconductor_device...

    The ceilings of semiconductor cleanrooms have fan filter units (FFUs) at regular intervals to constantly replace and filter the air in the cleanroom; semiconductor capital equipment may also have their own FFUs to clean air in the equipment's EFEM which allows the equipment to receive wafers in FOUPs. The FFUs, combined with raised floors with ...

  5. ACM Research - Wikipedia

    en.wikipedia.org/wiki/ACM_Research

    ACM Research, Inc. (ACMR) is a publicly traded American semiconductor company that engages in the manufacture and sale of single-wafer wet cleaning equipment used to improve product yield. Although based in the U.S., the majority of the company's business is done in China through its subsidiary, ACM Research (Shanghai).

  6. FSI International - Wikipedia

    en.wikipedia.org/wiki/FSI_International

    The five main series of equipment produced by the company are: ZETA, MERCURY, ORION, ANTARES, and POLARIS, and in earlier years, the company also produced the SATURN and NEPTUNE processing systems. Some of the products of the company are spray cleaning systems, single wafer cleaning systems, cryogenic processing systems, and immersion cleaning ...

  7. Lam Research - Wikipedia

    en.wikipedia.org/wiki/Lam_Research

    Lam Research Corporation is an American supplier of wafer-fabrication equipment and related services to the semiconductor industry. [2] Its products are used primarily in front-end wafer processing, which involves the steps that create the active components of semiconductor devices (transistors, capacitors) and their wiring (interconnects).

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