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Thin-film thickness monitors, deposition rate controllers, and so on, are a family of instruments used in high and ultra-high vacuum systems. They can measure the thickness of a thin film, not only after it has been made, but while it is still being deposited, and some can control either the final thickness of the film, the rate at which it is deposited, or both.
This technique has found applications in many different fields, from semiconductor physics to microelectronics and biology, from basic research to industrial applications. Ellipsometry is a very sensitive measurement technique and provides unequaled capabilities for thin film metrology.
The act of applying a thin film to a surface is thin-film deposition – any technique for depositing a thin film of material onto a substrate or onto previously deposited layers. "Thin" is a relative term, but most deposition techniques control layer thickness within a few tens of nanometres .
DGT has also been developed and calibrated for the measure of radionuclides, including for the analysis of actinides such as U, Pu, Am and Cm, both in the environment [19] and even in cooling pools for spent nuclear fuel rods. [20] DGT Research Ltd. was established in July 1997 by the original developers of the technique, Profs. Davison and ...
X-ray reflectivity (XRR) is a technique that measures thin-film properties including thickness, density, and surface roughness. [68] Another optical quality evaluation tool is spectroscopic ellipsometry. Its application between the depositions of each layer by ALD provides information on the growth rate and material characteristics of the film ...
Here Z F is the acoustic impedance of the film (Z F = ρ F c F = (ρ F G f) 1/2)= (ρ F /J f) 1/2), k F is the wave vector and d F is the film thickness. J f is the film's viscoelastic compliance, ρ F is the density. The poles of the tangent (k F d F = π/2) define the film resonances. [55] [56] At the film resonance, one has d F = λ/4. The ...
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