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Vacuum pumps are combined with chambers and operational procedures into a wide variety of vacuum systems. Sometimes more than one pump will be used (in series or in parallel) in a single application. A partial vacuum, or rough vacuum, can be created using a positive displacement pump that transports a gas load from an inlet port to an outlet ...
The system is an axial compressor that puts energy into the gas, rather than a turbine, which takes energy out of a moving fluid to create rotary power, thus "turbomolecular pump" is a misnomer. Gas captured by the upper stages is pushed into the lower stages and successively compressed to the level of the fore-vacuum (backing pump) pressure.
A vacuum ejector, or simply ejector, or aspirator, is a type of vacuum pump, which produces vacuum by means of the Venturi effect.. In an ejector, a working fluid (liquid or gaseous) flows through a jet nozzle into a tube that first narrows and then expands in cross-sectional area.
Getter pump or sorption pump In laboratory vacuum systems, the bulk NEG getter is often held in a separate vessel with its own heater, attached to the vacuum system by a valve, so that it can be replaced or renewed when saturated. [8] Ion getter pump Uses a high voltage electrode to ionize the gas molecules and drive them into the getter surface.
There is no single vacuum pump that can operate all the way from atmospheric pressure to ultra-high vacuum. Instead, a series of different pumps is used, according to the appropriate pressure range for each pump. In the first stage, a roughing pump clears most of the gas from the chamber. This is followed by one or more vacuum pumps that ...
An oil diffusion pump is used to achieve higher vacuum (lower pressure) than is possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high-vacuum range, down to 1 × 10 −9 mbar (1 × 10 −7 Pa), diffusion pumps today can produce pressures approaching 1 × 10 −10 mbar (1 × 10 −8 Pa) when properly used with modern fluids and accessories.