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The first reported piezoelectrically actuated RF MEMS switch was developed by scientists at the LG Electronics Institute of Technology in Seoul, South Korea in 2005. [3] The researchers designed and actualized a RF MEMS switch with a piezoelectric cantilever actuator that had an operation voltage of 2.5 volts. [7]
MEMS resonators have operated at over a gigahertz. [61] Common bells are mechanically struck, while MEMS resonators are electrically driven. There are two base technologies used to build MEMS resonators that differ in how electrical drive and sense signals are transduced from the mechanical motion. These are electrostatic and piezoelectric. All ...
The use of thin film piezoelectric materials in electronics began in the early 1960s at Bell Telephone Laboratories/Bell Labs. Earlier piezoelectric crystals were developed and used as resonators in applications like oscillators with frequencies up to 100 MHz. Thinning was applied for increasing the resonance frequency of the crystals.
A piezoelectric resonator is an electronic component designed for electronic oscillators and filters. Piezoelectric resonators are: crystal resonators, see Crystal oscillator; polycrystalline resonators, see Ceramic resonator; MEMS oscillators
Sand 9 uses aluminum nitride, a thin film that is deposited using standard semiconductor/MEMS fabrication technology, for the piezoelectric layer. The silicon MEMS products are smaller than comparable quartz devices and currently operate at fundamental frequencies up to 125 MHz. [ 4 ]
Vibrating structure MEMS gyroscope. Inexpensive vibrating structure microelectromechanical systems (MEMS) gyroscopes have become widely available. These are packaged similarly to other integrated circuits and may provide either analogue or digital outputs. In many cases, a single part includes gyroscopic sensors for multiple axes.
RF MEMS resonators offer the potential of on-chip integration of high-Q resonators and low-loss bandpass filters. The Q factor of RF MEMS resonators is in the order of 100–1000. [ 15 ] RF MEMS switch, switched capacitor and varactor technology, offers the tunable filter designer a compelling trade-off between insertion loss, linearity, power ...
A crystal oscillator is an electronic oscillator circuit that uses a piezoelectric crystal as a frequency-selective element. [1] [2] [3] The oscillator frequency is often used to keep track of time, as in quartz wristwatches, to provide a stable clock signal for digital integrated circuits, and to stabilize frequencies for radio transmitters and receivers.