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Rapid thermal anneal. Rapid thermal anneal (RTA) in rapid thermal processing is a process used in semiconductor device fabrication which involves heating a single wafer at a time in order to affect its electrical properties. Unique heat treatments are designed for different effects. Wafers can be heated in order to activate dopants, change film ...
Furnaces are capable of processing many wafers at a time but each process can last between several hours and a day. Increasingly, furnace anneals are being supplanted by Rapid Thermal Anneal (RTA) or Rapid Thermal Processing (RTP). This is due to the relatively long thermal cycles of furnaces that causes the dopants that are being activated ...
DC plasma (violet) enhances the growth of carbon nanotubes in a laboratory-scale PECVD (plasma-enhanced chemical vapor deposition) apparatus. Chemical vapor deposition (CVD) is a vacuum deposition method used to produce high-quality, and high-performance, solid materials. The process is often used in the semiconductor industry to produce thin ...
The Sun Microsystems UltraSPARC processor is a type of RISC microprocessor. In electronics and computer science, a reduced instruction set computer (RISC) is a computer architecture designed to simplify the individual instructions given to the computer to accomplish tasks. Compared to the instructions given to a complex instruction set computer ...
Crystal re-organization is a thermally activated process. Further crystallization of the amorphous phase may take place. Each of these processes will interfere with thermal expansion of the material. The material may be a blend or a two-phase block or graft copolymer. If both phases are amorphous then two Tg will be observed if the material ...
Thermal shock synthesis (TSS) is a method in which materials are synthesized via rapid, high-temperature heating. In the TSS process, temperatures as high as 3000 K are applied for a duration of just seconds or milliseconds, followed by rapid cooling (a TSS image shown in Fig. 1). [1][2][3] In this regard, TSS is distinct from conventional high ...
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A typical conveyor belt furnace. A conveyor belt furnace is a furnace that uses a conveyor or belt to carry process parts or material through a primary heating chamber for rapid thermal processing. It is designed for fast drying and curing of products, and has widespread use in the firing process of thick film and metallization process of solar ...