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An optical profilometer is a non-contact method for providing much of the same information as a stylus based profilometer. There are many different techniques which are currently being employed, such as laser triangulation ( triangulation sensor ), confocal microscopy (used for profiling very small objects), coherence scanning interferometry ...
Novacam's fiber-based optical profilometers and Optical Coherence Tomography (OCT) systems are based on low coherence interferometry. The fiber-based nature of Novacam's detector probes is unique in the optical metrology industry. [1] [2] [3] Novacam is a privately owned Canadian company that makes precision optical measuring instruments.
The disadvantage of a profilometer is that it is not accurate when the size of the features of the surface are close to the same size as the stylus. Another disadvantage is that profilometers have difficulty detecting flaws of the same general size as the roughness of the surface. [1] There are also limitations for non-contact instruments.
Figure 2: Optical setup of a Twyman-Green interferometer with a CCD image sensor. The interference occurs for white light when the path lengths of the measurement beam and the reference beam are nearly matched. By scanning (changing) the measurement beam path length relative to the reference beam, a correlogram is generated at each pixel. The ...
Part 602 describes this type of non-contact profilometer, incorporating a single point white light chromatic confocal sensor. The operating principle is based upon the chromatic dispersion of the white light source along the optical axis, via a confocal device, and the detection of the wavelength that is focused on the surface by a spectrometer .
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The measurement of the waviness can be done with a variety of instruments, including both surface finish profilometers and roundness instruments. The nature of these instruments is continually progressing and now includes both stylus-based contact instruments as well as optical & laser-based non-contact instruments.
To prevent distortion of the beam profile, the glass should be of optical quality — surface flatness of λ/10 (λ=633 nm) and scratch-dig of 40-20 or better. A half-wave plate followed by a polarizing beam splitter form a variable attenuator and this combination is often used in optical systems. The variable attenuator made in this fashion is ...