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A MEMS magnetic actuator is a device that uses the microelectromechanical systems (MEMS) to convert an electric current into a mechanical output by employing the well-known Lorentz Force Equation or the theory of Magnetism.
A MEMS magnetic field sensor is a small-scale microelectromechanical systems (MEMS) device for detecting and measuring magnetic fields (magnetometer). Many of these operate by detecting effects of the Lorentz force: a change in voltage or resonant frequency may be measured electronically, or a mechanical displacement may be measured optically ...
A capacitive MEMS switch is developed using a moving plate or sensing element, which changes the capacitance. [10] Ohmic switches are controlled by electrostatically controlled cantilevers. [11] Ohmic MEMS switches can fail from metal fatigue of the MEMS actuator (cantilever) and contact wear, since cantilevers can deform over time. [12]
Magnetic actuators offer very good linearity of the tilt angle versus the applied signal amplitude, both in static and dynamic operation. The working principle is that a metallic coil is placed on the moving MEMS mirror itself and as the mirror is placed in a magnetic field, the alternating current flowing in the coil generates Lorentz force ...
When a current is passed through the object, heat is created. The narrow arm is heated more than the wide arm because they have the same current density. Since the two arms are connected at the top, the stretching hot arm pushes in the direction of the cold arm. Magnetic actuators used fabricated magnetic layers to create forces.
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