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  2. Plasma etching - Wikipedia

    en.wikipedia.org/wiki/Plasma_etching

    The dry etch is then performed so that structured etching is achieved. After the process, the remaining photoresist has to be removed. This is also done in a special plasma etcher, called an asher. [14] Dry etching allows a reproducible, uniform etching of all materials used in silicon and III-V semiconductor technology. By using inductively ...

  3. Etching (microfabrication) - Wikipedia

    en.wikipedia.org/wiki/Etching_(microfabrication)

    Etching tanks used to perform Piranha, hydrofluoric acid or RCA clean on 4-inch wafer batches at LAAS technological facility in Toulouse, France. Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module in fabrication, and every wafer ...

  4. Semiconductor device fabrication - Wikipedia

    en.wikipedia.org/wiki/Semiconductor_device...

    Early semiconductor processes had arbitrary names for generations (viz., HMOS I/II/III/IV and CHMOS III/III-E/IV/V). Later each new generation process became known as a technology node [ 17 ] or process node , [ 18 ] [ 19 ] designated by the process' minimum feature size in nanometers (or historically micrometers ) of the process's transistor ...

  5. Differential Hall Effect Metrology - Wikipedia

    en.wikipedia.org/wiki/Differential_Hall_Effect...

    This data can be used to determine the depth profiles of carrier concentration, resistivity and mobility. DHE is a manual laboratory technique requiring wet chemical processing for etching and cleaning the sample between each measurement, [3] [7] and it has not been widely used in the semiconductor industry. Since the contact region is also ...

  6. List of semiconductor materials - Wikipedia

    en.wikipedia.org/wiki/List_of_semiconductor...

    A compound semiconductor is a semiconductor compound composed of chemical elements of at least two different species. These semiconductors form for example in periodic table groups 13–15 (old groups III–V), for example of elements from the Boron group (old group III, boron, aluminium, gallium, indium) and from group 15 (old group V, nitrogen, phosphorus, arsenic, antimony, bismuth).

  7. Category:III-V semiconductors - Wikipedia

    en.wikipedia.org/wiki/Category:III-V_semiconductors

    A III-V compound semiconductor is an alloy that contains elements from group III and group V of the periodic table. [1 Pages in category "III-V semiconductors" ...