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Figure 1: Schematic layout of a White-light Interferometer. A CCD image sensor like those used for digital photography is placed at the point where the two images are superimposed. A broadband “white light” source is used to illuminate the test and reference surfaces. A condenser lens collimates the light from the broadband light source.
Figure 3. White light interferometric microscope. White-light interferometry scanning (WLS) systems capture intensity data at a series of positions along the vertical axis, determining where the surface is located by using the shape of the white-light interferogram, the localized phase of the interferogram, or a combination of both shape and phase.
White light interferometry is commonly used for detecting deformations of the wafer surface based on optical measurements. Low-coherence light from a white light source passes through the optical top wafer, e.g. glass wafer, to the bond interface. Usually there are three different white light interferometers: diffraction grating interferometers
Planar lightwave circuit interferometer (PLC) Photon Doppler velocimeter interferometer (PDV) Polarization interferometer (see also Babinet–Soleil compensator) Point diffraction interferometer; Rayleigh interferometer; Sagnac interferometer; Schlieren interferometer (phase-shifting) Shearing interferometer (lateral and radial) Twyman–Green ...
Figure 1. The light path through a Michelson interferometer.The two light rays with a common source combine at the half-silvered mirror to reach the detector. They may either interfere constructively (strengthening in intensity) if their light waves arrive in phase, or interfere destructively (weakening in intensity) if they arrive out of phase, depending on the exact distances between the ...
There are many different techniques which are currently being employed, such as laser triangulation (triangulation sensor), confocal microscopy (used for profiling very small objects), coherence scanning interferometry, and digital holography. Advantages of optical profilometers are speed, reliability and spot size.
Interferometric scattering microscopy (iSCAT) refers to a class of methods that detect and image a subwavelength object by interfering the light scattered by it with a reference light field. The underlying physics is shared by other conventional interferometric methods such as phase contrast or differential interference contrast , or reflection ...
Interferometers are typically used to accurately measure distances. Planar lightwave circuits are either optical integrated circuits (ICs) or optical circuit boards made using the same manufacturing techniques as their electronic counterparts, using optical waveguides to route photons the same way that metal traces are used to route electrons ...