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2. Furnace anneal - Wikipedia

   en.wikipedia.org/wiki/Furnace_anneal

   Anneal furnace, 2018. Furnace annealing is a process used in semiconductor device fabrication which consist of heating multiple semiconductor wafers in order to affect their electrical properties. Heat treatments are designed for different effects. Wafers can be heated in order to activate dopants, change film to film or film to wafer substrate ...

3. Annealing (materials science) - Wikipedia

   en.wikipedia.org/wiki/Annealing_(materials_science)

   In metallurgy and materials science, annealing is a heat treatment that alters the physical and sometimes chemical properties of a material to increase its ductility and reduce its hardness, making it more workable. It involves heating a material above its recrystallization temperature, maintaining a suitable temperature for an appropriate ...

4. Semiconductor device fabrication - Wikipedia

   en.wikipedia.org/wiki/Semiconductor_device...

   Semiconductor device fabrication. Semiconductor device fabrication is the process used to manufacture semiconductor devices, typically integrated circuits (ICs) such as computer processors, microcontrollers, and memory chips (such as RAM and Flash memory). It is a multiple-step photolithographic and physico-chemical process (with steps such as ...

5. Photolithography - Wikipedia

   en.wikipedia.org/wiki/Photolithography

   Photolithography is the most common method for the semiconductor fabrication of integrated circuits ("ICs" or "chips"), such as solid-state memories and microprocessors. It can create extremely small patterns, down to a few nanometers in size. It provides precise control of the shape and size of the objects it creates.

6. Rapid thermal processing - Wikipedia

   en.wikipedia.org/wiki/Rapid_thermal_processing

   Rapid thermal anneal. Rapid thermal anneal (RTA) in rapid thermal processing is a process used in semiconductor device fabrication which involves heating a single wafer at a time in order to affect its electrical properties. Unique heat treatments are designed for different effects. Wafers can be heated in order to activate dopants, change film ...

7. Self-aligned gate - Wikipedia

   en.wikipedia.org/wiki/Self-aligned_gate

   Self-aligned gate. In semiconductor electronics fabrication technology, a self-aligned gate is a transistor manufacturing approach whereby the gate electrode of a MOSFET (metal–oxide–semiconductor field-effect transistor) is used as a mask for the doping of the source and drain regions. This technique ensures that the gate is naturally and ...