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The squeeze-film pressure sensor is a type of MEMS resonant pressure sensor that operates by a thin membrane that compresses a thin film of gas at high frequency. Since the compressibility and stiffness of the gas film are pressure dependent, the resonance frequency of the squeeze-film pressure sensor is used as a measure of the gas pressure.
A piezoelectric sensor is a device that uses the piezoelectric effect to measure changes in pressure, acceleration, temperature, strain, or force by converting them to an electrical charge. The prefix piezo- is Greek for 'press' or 'squeeze'.
Engine coolant temperature sensor; Hall effect sensor; Wheel speed sensor; Airbag sensors; Automatic transmission speed sensor; Brake fluid pressure sensor; Camshaft position sensor (CMP) Cylinder Head Temperature gauge; Engine crankcase pressure sensor; Exhaust gas temperature sensor; Fuel level sensor; Fuel pressure sensor; Knock sensor ...
Detection of pressure variations in the form of sound is the most common sensor application, e.g. piezoelectric microphones (sound waves bend the piezoelectric material, creating a changing voltage) and piezoelectric pickups for acoustic-electric guitars. A piezo sensor attached to the body of an instrument is known as a contact microphone.
MAP sensors measure absolute pressure. Boost sensors or gauges measure the amount of pressure above a set absolute pressure. That set absolute pressure is usually 100 kPa. This is commonly referred to as gauge pressure. Boost pressure is relative to absolute pressure - as one increases or decreases, so does the other.
The whole thickness of a silicon wafer is used for building the micro-mechanical structures. [20] Silicon is machined using various etching processes. Bulk micromachining has been essential in enabling high performance pressure sensors and accelerometers that changed the sensor industry in the 1980s and 1990s.