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The E-T secondary electron detector can be used in the SEM's back-scattered electron mode by either turning off the Faraday cage or by applying a negative voltage to the Faraday cage. However, better back-scattered electron images come from dedicated BSE detectors rather than from using the E–T detector as a BSE detector.
Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a scientific instrument that resembles a scanning electron microscope (SEM).
Charge coupled device (CCD) cameras were first applied to transmission electron microscopy in the 1980s and later became widespread. [3] [4] For use in a TEM, CCDs are typically coupled with a scintillator such as single crystal Yttrium aluminium garnet (YAG) in which electrons from the electron beam are converted to photons, which are then transferred to the sensor of the CCD via a fiber ...
Electron-beam-induced current (EBIC) is a semiconductor analysis technique performed in a scanning electron microscope (SEM) or scanning transmission electron microscope (STEM). It is most commonly used to identify buried junctions or defects in semiconductors, or to examine minority carrier properties.
The addition of auto-alignment systems reduced the setup time needed to image multiple ICs, and by the late 1980s, the stepper had almost entirely replaced the aligner in the high-end market. The stepper was itself replaced by the step-and-scan systems (scanners) which offered an additional order of magnitude resolution advance.
In ionizing radiation detection physics, a semiconductor detector is a device that uses a semiconductor (usually silicon or germanium) to measure the effect of incident charged particles or photons. Semiconductor detectors find broad application for radiation protection , gamma and X-ray spectrometry , and as particle detectors .