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A turbomolecular pump is a type of vacuum pump, superficially similar to a turbopump, used to obtain and maintain high vacuum. [ 1 ] [ 2 ] These pumps work on the principle that gas molecules can be given momentum in a desired direction by repeated collision with a moving solid surface.
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Ultra-high vacuum (often spelled ultrahigh in American English, UHV) is the vacuum regime characterised by pressures lower than about 1 × 10 −6 pascals (1.0 × 10 −8 mbar; 7.5 × 10 −9 Torr). UHV conditions are created by pumping the gas out of a UHV chamber.
To achieve a higher vacuum, other techniques must then be used, typically in series (usually following an initial fast pump down with a positive displacement pump). Some examples might be use of an oil sealed rotary vane pump (the most common positive displacement pump) backing a diffusion pump, or a dry scroll pump backing a turbomolecular pump.
Generally, axial pumps tend to give much lower pressures than centrifugal pumps, and a few bars is not uncommon. Their advantage is a much higher volumetric flowrate. For this reason they are common for pumping liquid hydrogen in rocket engines, because of its much lower density than other propellants which usually use centrifugal pump designs.
The turbomolecular pump overcame many of these disadvantages. Many modern turbomolecular pumps contain built-in molecular drag stages, which allows them to operate at higher foreline pressures. As a stage in turbo molecular pumps, the most widely used design is the Holweck type, due to a significantly higher pumping speed than the Gaede design.
Samples may become contaminated by titanium if they have line-of-sight to the pump. Also, titanium is a very hard material, so titanium film which builds up on the inside of the chamber may form flakes which fall into mechanical components (typically turbomolecular pumps and valves) and damage them. Many chambers containing TSPs also have an ...
Vacuum systems usually consist of gauges, vapor jet and pumps, vapor traps and valves along with other extensional piping. A vessel that is operating under vacuum system may be any of these types such as processing tank, steam simulator, particle accelerator, or any other type of space that has an enclosed chamber to maintain the system in less than atmospheric gas pressure.