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  2. Vacuum pump - Wikipedia

    en.wikipedia.org/wiki/Vacuum_pump

    In the field of oil regeneration and re-refining, vacuum pumps create a low vacuum for oil dehydration and a high vacuum for oil purification. [44] A vacuum may be used to power, or provide assistance to mechanical devices. In hybrid and diesel engine motor vehicles, a pump fitted on the engine (usually on the camshaft) is used to produce a vacuum.

  3. Liquid-ring pump - Wikipedia

    en.wikipedia.org/wiki/Liquid-ring_pump

    Single-stage vacuum pumps typically produce vacuum to 35 torr (mm Hg) or 47 millibars (4.7 kPa), and two-stage pumps can produce vacuum to 25 torr, assuming air is being pumped and the ring-liquid is water at 15 °C (59 °F) or less. Dry air and 15 °C sealant-water temperature is the standard performance basis, which most manufacturers use for ...

  4. Diffusion pump - Wikipedia

    en.wikipedia.org/wiki/Diffusion_pump

    An oil diffusion pump is used to achieve higher vacuum (lower pressure) than is possible by use of positive displacement pumps alone. Although its use has been mainly associated within the high-vacuum range, down to 1 × 10 −9 mbar (1 × 10 −7 Pa), diffusion pumps today can produce pressures approaching 1 × 10 −10 mbar (1 × 10 −8 Pa) when properly used with modern fluids and accessories.

  5. Cryopump - Wikipedia

    en.wikipedia.org/wiki/Cryopump

    A cryopump or a "cryogenic pump" is a vacuum pump that traps gases and vapours by condensing them on a cold surface, but are only effective on some gases. The effectiveness depends on the freezing and boiling points of the gas relative to the cryopump's temperature.

  6. Edwards Vacuum - Wikipedia

    en.wikipedia.org/wiki/Edwards_Vacuum

    In 1984, Edwards developed and patented the first practical high vacuum dry (no-oil) pump. The design was taken up by the fast-growing semiconductor manufacturing market. [17] In 1992, Edwards purchased Electrotech Ltd's semiconductor manufacturing exhaust gas management systems.

  7. Cold trap - Wikipedia

    en.wikipedia.org/wiki/Cold_trap

    Pumps that use oil either as their working fluid (diffusion pumps), or as their lubricant (mechanical rotary pumps), are often the sources of contamination in vacuum systems. Placing a cold trap at the mouth of such a pump greatly lowers the risk that oil vapours will backstream into the cavity.