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The prior art includes an RF MEMS frequency tunable fractal antenna for the 0.1–6 GHz frequency range, [18] and the actual integration of RF MEMS switches on a self-similar Sierpinski gasket antenna to increase its number of resonant frequencies, extending its range to 8 GHz, 14 GHz and 25 GHz, [19] [20] an RF MEMS radiation pattern ...
MEMS resonators have operated at over a gigahertz. [61] Common bells are mechanically struck, while MEMS resonators are electrically driven. There are two base technologies used to build MEMS resonators that differ in how electrical drive and sense signals are transduced from the mechanical motion. These are electrostatic and piezoelectric. All ...
In a free-standing resonator structure air is used to separate the resonator from the substrate/surrounding. The structure of a free-standing resonator is based on some typical manufacturing steps used in micro-electromechanical systems MEMS. A schematic cross-section of the SMR structure with a one-sided acoustic mirror
A common component used for radio frequency filtering (and MEMS applications generally), is the cantilever resonator. Cantilevers are simple mechanical components to manufacture by much the same methods used by the semiconductor industry; masking, photolithography and etching, with a final undercutting etch to separate the cantilever from the ...
A resonator is a device or system that exhibits resonance or resonant behavior. That is, it naturally oscillates with greater amplitude at some frequencies, called resonant frequencies, than at other frequencies. The oscillations in a resonator can be either electromagnetic or mechanical (including acoustic). Resonators are used to either ...
The first reported piezoelectrically actuated RF MEMS switch was developed by scientists at the LG Electronics Institute of Technology in Seoul, South Korea in 2005. [3] The researchers designed and actualized a RF MEMS switch with a piezoelectric cantilever actuator that had an operation voltage of 2.5 volts. [7]
An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.
The cavities serve as resonators (tank circuits) to determine the frequency of the oscillators. A microwave cavity or radio frequency cavity (RF cavity) is a special type of resonator, consisting of a closed (or largely closed) metal structure that confines electromagnetic fields in the microwave or RF region of the spectrum.