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The first reported piezoelectrically actuated RF MEMS switch was developed by scientists at the LG Electronics Institute of Technology in Seoul, South Korea in 2005. [3] The researchers designed and actualized a RF MEMS switch with a piezoelectric cantilever actuator that had an operation voltage of 2.5 volts. [7]
A piezoelectric resonator is an electronic component designed for electronic oscillators and filters. Piezoelectric resonators are: crystal resonators, see Crystal oscillator; polycrystalline resonators, see Ceramic resonator; MEMS oscillators
The use of thin film piezoelectric materials in electronics began in the early 1960s at Bell Telephone Laboratories/Bell Labs. Earlier piezoelectric crystals were developed and used as resonators in applications like oscillators with frequencies up to 100 MHz. Thinning was applied for increasing the resonance frequency of the crystals.
MEMS resonators have operated at over a gigahertz. [61] Common bells are mechanically struck, while MEMS resonators are electrically driven. There are two base technologies used to build MEMS resonators that differ in how electrical drive and sense signals are transduced from the mechanical motion. These are electrostatic and piezoelectric. All ...
Sand 9 developed its piezoelectric MEMS resonator technology as an alternative to quartz timing devices. [16] Sand 9 uses aluminum nitride, a thin film that is deposited using standard semiconductor/MEMS fabrication technology, for the piezoelectric layer.
RF MEMS resonators offer the potential of on-chip integration of high-Q resonators and low-loss bandpass filters. The Q factor of RF MEMS resonators is in the order of 100–1000. [ 15 ] RF MEMS switch, switched capacitor and varactor technology, offers the tunable filter designer a compelling trade-off between insertion loss, linearity, power ...
Recently, MEMS (Micro-Electro-Mechanical-System) resonators fabricated by surface micromachining have enabled ultra-low power stable pierce oscillators. The tiny form factor of MEMS resonators greatly reduced the power consumption of the oscillator while keeping the good stability thanks to their very-high Q.
Piezoelectric micromachined ultrasonic transducers (PMUT) are MEMS-based piezoelectric ultrasonic transducers.Unlike bulk piezoelectric transducers which use the thickness-mode motion of a plate of piezoelectric ceramic such as PZT or single-crystal PMN-PT, PMUT are based on the flexural motion of a thin membrane coupled with a thin piezoelectric film, such as PVDF.