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An early example of a MEMS cantilever is the Resonistor, [7] [8] an electromechanical monolithic resonator. MEMS cantilevers are commonly fabricated from silicon (Si), silicon nitride (Si 3 N 4), or polymers. The fabrication process typically involves undercutting the cantilever structure to release it, often with an anisotropic wet or dry ...
Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important process module in fabrication, and every wafer undergoes many etching steps before it is complete.
A groove or structure is made on a substrate to form a template. The desired material is then deposited in that template. Once the tip is formed, the template is etched off, leaving the tip and cantilever. Fig. 7 illustrates diamond tip fabrication on silicon wafers using this method. [56]
The cantilever method is an approximate method for calculating shear forces and moments developed in beams and columns of a frame or structure due to lateral loads. The applied lateral loads typically include wind loads and earthquake loads, which must be taken into consideration while designing buildings.
A process flow diagram (PFD) is a diagram commonly used in chemical and process engineering to indicate the general flow of plant processes and equipment. The PFD displays the relationship between major equipment of a plant facility and does not show minor details such as piping details and designations.
A sacrificial layer is used to build complicated components, such as movable parts. For example, a suspended cantilever can be built by depositing and structuring a sacrificial layer, which is then selectively removed at the locations where the future beams must be attached to the substrate (i.e. the anchor points).
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