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A cleanroom or clean room is an engineered space that maintains a very low concentration of airborne particulates. It is well isolated, well controlled from contamination, and actively cleansed. Such rooms are commonly needed for scientific research and in industrial production for all nanoscale processes, such as semiconductor manufacturing. A ...
ISO 14644-7: Separative devices (clean air hoods, gloveboxes, isolators and minienvironments [3] ISO 14644-8:2022(en), Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness for chemical concentration (ACC) ISO 14644-9: Classification of surface particle cleanliness [3]
Institute of Environmental Sciences and Technology; Critical Distinctions Between Clean Room Carts and Laboratory Carts Archived 2018-09-01 at the Wayback Machine; ISO 14644-1 Cleanroom Classifications
Air showers are specialized enclosed antechambers which are incorporated as entryways of cleanrooms and other controlled environments to reduce particle contamination. [1] Air showers utilize high-pressure, HEPA- or ULPA-filtered air to remove dust, fibrous lint and other contaminants from personnel or object surfaces. The forceful "cleansing ...
In the cleanroom, the environment is controlled to eliminate all dust, since even a single speck can ruin a microcircuit, which has nanoscale features much smaller than dust particles. The clean room must also be damped against vibration to enable nanometer-scale alignment of photolithography machines and must be kept within narrow bands of ...
ISO 14698-1 was first written in 2003. ISO 14698-1 describes the principles and basic methodology for a formal system to assess and control biocontamination, where cleanroom technology is applied, in order that biocontamination in zones at risk can be monitored in a reproducible way and appropriate control measures can be selected.
Both are devices that provide a physical and aerodynamic (air overpressure) barrier between the external clean room environment and a work process. The isolator design is the more dependable of the two barrier design choices, as it prevents contamination hazards by achieving a more comprehensive separation of the processing environment from the ...
SMIF pods can be accessed by automated mechanical interfaces on production equipment. The wafers therefore remain in a carefully controlled environment whether in the SMIF pod or in a tool, without being exposed to the surrounding airflow. Each SMIF pod contains a wafer cassette in which the wafers are stored horizontally.