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A vacuum pump is a type of pump device that draws gas particles from a sealed volume in order to leave behind a partial vacuum. The first vacuum pump was invented in 1650 by Otto von Guericke , and was preceded by the suction pump, which dates to antiquity.
low (rough) vacuum Pressure can be achieved by simple materials (e.g. regular steel) and positive displacement vacuum pumps; viscous flow regime for gases <100 Pa to 0.1 Pa medium (fine) vacuum Pressure can be achieved by elaborate materials (e.g. stainless steel) and positive displacement vacuum pumps; transitional flow regime for gases
Single-stage vacuum pumps typically produce vacuum to 35 torr (mm Hg) or 47 millibars (4.7 kPa), and two-stage pumps can produce vacuum to 25 torr, assuming air is being pumped and the ring-liquid is water at 15 °C (59 °F) or less. Dry air and 15 °C sealant-water temperature is the standard performance basis, which most manufacturers use for ...
This includes low vacuum applications, with the Roots blower acting alone, or in combination with other pumps as part of a high vacuum system. One very common industrial application is in pneumatic conveying systems, [4] the blower delivering a high volume of air for the movement of bulk solids through pipes.
Vacuum pumps and systems; Vapour pressure; Typically, UHV requires: High pumping speed — possibly multiple vacuum pumps in series and/or parallel; Minimized surface area in the chamber; High conductance tubing to pumps — short and fat, without obstruction; Use of low-outgassing materials such as certain stainless steels
Furthermore, vane pumps can be used in low-pressure gas applications such as secondary air injection for auto exhaust emission control, or in low-pressure chemical vapor deposition systems [citation needed]. Rotary-vane pumps are also a common type of vacuum pump, with two-stage pumps able to reach pressures well below 10 −6 bar.