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RF MEMS switched capacitors are capacitive fixed-fixed beam switches with a low capacitance ratio. RF MEMS varactors are capacitive fixed-fixed beam switches which are biased below pull-in voltage. Other examples of RF MEMS switches are ohmic cantilever switches, and capacitive single pole N throw (SPNT) switches based on the axial gap wobble ...
MEMS clock generators are MEMS timing devices with multiple outputs for systems that need more than a single reference frequency. MEMS oscillators are a valid alternative to older, more established quartz crystal oscillators, offering better resilience against vibration and mechanical shock, and reliability with respect to temperature variation.
An early example of a MEMS device is the resonant-gate transistor, an adaptation of the MOSFET, developed by Robert A. Wickstrom for Harvey C. Nathanson in 1965. [4] Another early example is the resonistor, an electromechanical monolithic resonator patented by Raymond J. Wilfinger between 1966 and 1971.
A digitally tuned capacitor is an IC variable capacitor based on several technologies. MEMS , BST and SOI / SOS devices are available from a number of suppliers and vary in capacitance range, quality factor and resolution for different RF tuning applications.
in DRAM memory circuits, capacitor trenches may be 10–20 μm deep, in MEMS, DRIE is used for anything from a few micrometers to 0.5 mm. in irregular chip dicing, DRIE is used with a novel hybrid soft/hard mask to achieve sub-millimeter etching to dice silicon dies into lego-like pieces with irregular shapes. [7] [8] [9]
Electrical breakdown limits for MEMS; High Voltage Experimenter's Handbook Archived 2011-10-16 at the Wayback Machine; Paschen's law calculator; Breakdown Voltage vs. Pressure In the internet archive 16.04.2023; Electrical Breakdown of Low Pressure Gases; Electrical Discharges; Pressure Dependence of Plasma Structure in Microwave Gas Breakdown ...
The Q factor is a parameter that describes the resonance behavior of an underdamped harmonic oscillator (resonator). Sinusoidally driven resonators having higher Q factors resonate with greater amplitudes (at the resonant frequency) but have a smaller range of frequencies around that frequency for which they resonate; the range of frequencies for which the oscillator resonates is called the ...
Capacitors are used as the sensor in condenser microphones, where one plate is moved by air pressure, relative to the fixed position of the other plate. Some accelerometers use MEMS capacitors etched on a chip to measure the magnitude and direction of the