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An inductively coupled plasma (ICP) or transformer coupled plasma (TCP) [1] is a type of plasma source in which the energy is supplied by electric currents which are produced by electromagnetic induction, that is, by time-varying magnetic fields.
Induction plasma, also called inductively coupled plasma, is a type of high temperature plasma generated by electromagnetic induction, usually coupled with argon gas. The magnetic field induces an electric current within the gas which creates the plasma. The plasma can reach temperatures up to 10,000 Kelvin. Inductive plasma technology is used ...
It is a type of emission spectroscopy that uses the inductively coupled plasma to produce excited atoms and ions that emit electromagnetic radiation at wavelengths characteristic of a particular element. [1] The plasma is a high temperature source of ionised source gas (often argon).
Inductively coupled plasma mass spectrometry (ICP-MS) is a type of mass spectrometry that uses an inductively coupled plasma to ionize the sample. It atomizes the sample and creates atomic and small polyatomic ions , which are then detected.
Inductively coupled plasma atomic emission spectrometer. Atomic emission spectroscopy (AES) is a method of chemical analysis that uses the intensity of light emitted from a flame, plasma, arc, or spark at a particular wavelength to determine the quantity of an element in a sample.
Other types of RIE systems exist, including inductively coupled plasma (ICP) RIE. In this type of system, the plasma is generated with a radio frequency (RF) powered magnetic field. Very high plasma densities can be achieved, though etch profiles tend to be more isotropic. A combination of parallel plate and inductively coupled plasma RIE is ...