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Samples may become contaminated by titanium if they have line-of-sight to the pump. Also, titanium is a very hard material, so titanium film which builds up on the inside of the chamber may form flakes which fall into mechanical components (typically turbomolecular pumps and valves) and damage them. Many chambers containing TSPs also have an ...
Ion pumps; Titanium sublimation pumps; Non-evaporable getter (NEG) pumps; Cryopumps; Diffusion pumps, especially when used with a cryogenic trap designed to minimize backstreaming of pump oil into the systems. Turbo pumps and diffusion pumps rely on supersonic attack upon system molecules by the blades and high speed vapor stream, respectively.
A sublimatory [1] [2] or sublimation apparatus is equipment, commonly laboratory glassware, for purification of compounds by selective sublimation. In principle, the operation resembles purification by distillation , except that the products do not pass through a liquid phase .
Titanium is a chemical element; it has symbol Ti and atomic number 22. ... titanium that is evaporated from filaments is the basis for titanium sublimation pumps, ...
Close-space sublimation, the material, and substrate are placed close to one another and radiatively heated. Pulsed laser deposition: a high-power laser ablates material from the target into a vapor. Thermal laser epitaxy: a continuous-wave laser evaporates individual, free-standing elemental sources which then condense upon a substrate.
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