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Figure 1: Schematic layout of a White-light Interferometer. A CCD image sensor like those used for digital photography is placed at the point where the two images are superimposed. A broadband “white light” source is used to illuminate the test and reference surfaces. A condenser lens collimates the light from the broadband light source.
Figure 3. White light interferometric microscope. White-light interferometry scanning (WLS) systems capture intensity data at a series of positions along the vertical axis, determining where the surface is located by using the shape of the white-light interferogram, the localized phase of the interferogram, or a combination of both shape and phase.
Diffraction-grating interferometer (white light) Double-slit interferometer; Dual-polarization interferometry; Fabry–Pérot interferometer; Fizeau interferometer; Fourier-transform interferometer; Fresnel interferometer (e.g. Fresnel biprism, Fresnel mirror or Lloyd's mirror) Fringes of Equal Chromatic Order interferometer (FECO) Gabor hologram
White light interferometry is commonly used for detecting deformations of the wafer surface based on optical measurements. Low-coherence light from a white light source passes through the optical top wafer, e.g. glass wafer, to the bond interface. Usually there are three different white light interferometers: diffraction grating interferometers
DHM performs static measurements of 3D surface topography as many other 3D optical profilometers (white light interferometers, confocal, focus variation, ... ). It enables to retrieve, roughness and shape of many surfaces. [32] [33] [34] Use of multiple wavelengths enable to overcome the l/4 limit of traditional phase shifting interferometers ...
They can also use coherence scanning interferometry (CSI) with a white-light source to measure steep or rough surfaces, including machined metal, foam, paper and more. As is the case with all optical techniques, the interaction of light with the sample for this instruments is not fully understood.
Interferometric scattering microscopy (iSCAT) refers to a class of methods that detect and image a subwavelength object by interfering the light scattered by it with a reference light field. The underlying physics is shared by other conventional interferometric methods such as phase contrast or differential interference contrast , or reflection ...
The variation of refractive index vs. vacuum wavelength for various glasses. The wavelengths of visible light are shaded in grey. Influences of selected glass component additions on the mean dispersion of a specific base glass (n F valid for λ = 486 nm (blue), n C valid for λ = 656 nm (red)) [3]