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Most turbomolecular pumps employ multiple stages, each consisting of a quickly rotating rotor blade and stationary stator blade pair. The system is an axial compressor that puts energy into the gas, rather than a turbine, which takes energy out of a moving fluid to create rotary power, thus "turbomolecular pump" is a misnomer.
Edwards Ltd is a British multinational vacuum pump and exhaust gas management systems manufacturer. Its headquarters are in Burgess Hill , UK, and has been part of the Atlas Copco Group since 2014. [ 12 ] [ 13 ] [ 1 ] Edwards holds 1,700 patents , including for dry (oil-free) vacuum pumps , and produces equipment used for manufacturing ...
The turbomolecular pump overcame many of these disadvantages. Many modern turbomolecular pumps contain built-in molecular drag stages, which allows them to operate at higher foreline pressures. As a stage in turbo molecular pumps, the most widely used design is the Holweck type, due to a significantly higher pumping speed than the Gaede design.
Generally, axial pumps tend to give much lower pressures than centrifugal pumps, and a few bars is not uncommon. Their advantage is a much higher volumetric flowrate. For this reason they are common for pumping liquid hydrogen in rocket engines, because of its much lower density than other propellants which usually use centrifugal pump designs.
The two main types of molecular pumps are the diffusion pump and the turbomolecular pump. Both types of pumps blow out gas molecules that diffuse into the pump by imparting momentum to the gas molecules. Diffusion pumps blow out gas molecules with jets of an oil or mercury vapor, while turbomolecular pumps use high speed fans to push the gas.
Among the most significant industrial applications are turbomolecular pumps for vacuum generation in semiconductor production plants. First commercial magnetic bearing type turbopumps without mechanical stabilisation were marketed by Leybold AG in 1975 (electromagnetic) and in 1989 (permanent magnet based).