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The list below provides an overview of companies that develop and fabricate MEMS (microelectromechanical systems) devices. These companies are usually referred to the concept of foundries. The offer of the companies varies according to the used material, the production volume and the size of the wafers used for the fabrication.
MEMS magnetic field sensor (magnetometer) may also be incorporated in such devices to provide directional heading. MEMS inertial navigation systems (INSs) of modern cars, airplanes, submarines and other vehicles to detect yaw, pitch, and roll; for example, the autopilot of an airplane. [27]
Fusion of the sensor element with analog amplification, analog-to-digital converter and digital intelligence for linearization and temperature compensation on the same micro chip. 4th Generation Memory cells for calibration- and temperature compensation data are added to the elements of the 3rd MEMS sensor generation.
A MEMS magnetic field sensor is a small-scale microelectromechanical systems (MEMS) device for detecting and measuring magnetic fields (magnetometer). Many of these operate by detecting effects of the Lorentz force : a change in voltage or resonant frequency may be measured electronically, or a mechanical displacement may be measured optically.
Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems that involve sensing or manipulating optical signals at a very small size. MOEMS includes a wide variety of devices, for example optical switch, optical cross-connect, tunable VCSEL, microbolometers.
The completed MEMS devices, enclosed in small chip-level vacuum chambers, are diced from their silicon wafers, and the resonator die are stacked on CMOS die and molded into plastic packages to form oscillators. MEMS oscillators are packaged in the same factories and with the same equipment and materials that are used for standard IC packaging.
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