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Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the biological field for site-specific analysis, deposition, and ablation of materials. A FIB setup is a scientific instrument that resembles a scanning electron microscope (SEM).
An account of the early history of scanning electron microscopy has been presented by McMullan. [2] [3] Although Max Knoll produced a photo with a 50 mm object-field-width showing channeling contrast by the use of an electron beam scanner, [4] it was Manfred von Ardenne who in 1937 invented [5] a microscope with high resolution by scanning a very small raster with a demagnified and finely ...
A scanning transmission electron microscope (STEM) is a type of transmission electron microscope (TEM). Pronunciation is [stɛm] or [ɛsti:i:ɛm]. As with a conventional transmission electron microscope (CTEM), images are formed by electrons passing through a sufficiently thin specimen. However, unlike CTEM, in STEM the electron beam is focused ...
The addition of auto-alignment systems reduced the setup time needed to image multiple ICs, and by the late 1980s, the stepper had almost entirely replaced the aligner in the high-end market. The stepper was itself replaced by the step-and-scan systems (scanners) which offered an additional order of magnitude resolution advance. Step-and-scan ...
Low energy electron optical systems are also hard to design for high resolution. [41] Coulomb inter-electron repulsion always becomes more severe for lower electron energy. Scanning probe lithography. A scanning probe can be used for low-energy electron beam lithography, offering sub-100 nm resolution, determined by the dose of low-energy ...
Electron-beam-induced current (EBIC) is a semiconductor analysis technique performed in a scanning electron microscope (SEM) or scanning transmission electron microscope (STEM). It is most commonly used to identify buried junctions or defects in semiconductors, or to examine minority carrier properties.
Mochii is a miniature scanning electron microscope made by Seattle-based startup company Voxa. The Mochii has the same capabilities as a conventional SEM, such as usage in materials science for research purposes, microchip and semiconductor quality control, and medicine. [2] Mochii users are able to operate the microscope using an IOS app.
In ionizing radiation detection physics, a semiconductor detector is a device that uses a semiconductor (usually silicon or germanium) to measure the effect of incident charged particles or photons. Semiconductor detectors find broad application for radiation protection , gamma and X-ray spectrometry , and as particle detectors .