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The name Scanning Capacitance Microscopy was first used to describe a quality control tool for the RCA/CED (Capacitance Electronic Disc), [1] a video disk technology that was a predecessor of the DVD. It has since been adapted for use in combination with scanned probe microscopes for measuring other systems and materials with semiconductor ...
Differential interference contrast (DIC) microscopy, also known as Nomarski interference contrast (NIC) or Nomarski microscopy, is an optical microscopy technique used to enhance the contrast in unstained, transparent samples. DIC works on the principle of interferometry to gain information about the optical path length of the sample, to see ...
Semiconductor manufacturing equipment has been considered costly since 1978. [46] In 1984, KLA developed the first automatic reticle and photomask inspection tool. [47] In 1985, KLA developed an automatic inspection tool for silicon wafers, which replaced manual microscope inspection. [48]
Fluorescence and confocal microscopes operating principle. Confocal microscopy, most frequently confocal laser scanning microscopy (CLSM) or laser scanning confocal microscopy (LSCM), is an optical imaging technique for increasing optical resolution and contrast of a micrograph by means of using a spatial pinhole to block out-of-focus light in image formation. [1]
An account of the early history of scanning electron microscopy has been presented by McMullan. [2] [3] Although Max Knoll produced a photo with a 50 mm object-field-width showing channeling contrast by the use of an electron beam scanner, [4] it was Manfred von Ardenne who in 1937 invented [5] a microscope with high resolution by scanning a very small raster with a demagnified and finely ...
Inside the aberration corrector (hexapole -hexapole type) A scanning transmission electron microscope (STEM) is a type of transmission electron microscope (TEM). Pronunciation is [stɛm] or [ɛsti:i:ɛm]. As with a conventional transmission electron microscope (CTEM), images are formed by electrons passing through a sufficiently thin specimen.
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