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The phrase depth of focus is sometimes erroneously used to refer to depth of field (DOF), which is the distance from the lens in acceptable focus, whereas the true meaning of depth of focus refers to the zone behind the lens wherein the film plane or sensor is placed to produce an in-focus image. Depth of field depends on the focus distance ...
Photolithography (also known as optical lithography) ... The depth of focus restricts the thickness of the photoresist and the depth of the topography on the wafer.
However, [clarification needed] the depth of focus, or tolerance in wafer topography flatness, is improved compared to the corresponding "dry" tool at the same resolution. [ 4 ] The idea for immersion lithography was patented in 1984 by Takanashi et al. [ 5 ] It was also proposed by Taiwanese engineer Burn J. Lin and realized in the 1980s. [ 6 ]
Good depth of focus requires diffracted light traveling at comparable angles with the optical axis, and this requires the appropriate illumination angle. [4] Assuming the correct illumination angle, OPC can direct more diffracted light along the right angles for a given pitch, but without the correct illumination angle, such angles will not ...
C. Welborne Piper may be the first to have published a clear distinction between Depth of Field in the modern sense and Depth of Definition in the focal plane, and implies that Depth of Focus and Depth of Distance are sometimes used for the former (in modern usage, Depth of Focus is usually reserved for the latter). [5]
The Azores acquisition uniquely positions Rudolph in the back-end stepper advanced packaging photolithography market with a significantly expanded business model, and we believe that by offering ...
The range of distances that are nearly in focus is called the depth of field. Depth of field generally increases with decreasing aperture diameter (increasing f-number). The unfocused blur outside the depth of field is sometimes used for artistic effect in photography. The subjective appearance of this blur is known as bokeh.
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