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Non-Contact Optical Profilometer A contact profilometer at LAAS technological facility in Toulouse, France. A profilometer is a measuring instrument used to measure a surface's profile, in order to quantify its roughness. Critical dimensions as step, curvature, flatness are computed from the surface topography.
Surface finish may be measured in two ways: contact and non-contact methods. Contact methods involve dragging a measurement stylus across the surface; these instruments are called profilometers . Non-contact methods include: interferometry , digital holography , confocal microscopy , focus variation , structured light , electrical capacitance ...
Surface finish may be measured in two ways: contact and non-contact methods. Contact methods involve dragging a measurement stylus across the surface; these instruments are called profilometers . Non-contact methods include: interferometry , confocal microscopy , focus variation , structured light , electrical capacitance , electron microscopy ...
The vertical uncertainty depends mainly on the roughness of the measured surface. For smooth surfaces, the accuracy of the measurement is limited by the accuracy of the positioning stage. The lateral positions of the height values depend on the corresponding object point that is imaged by the pixel matrix.
Part 606: Nominal characteristics of non-contact (focus variation) instruments; Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments; Part 700: Calibration of surface texture measuring instruments [NWIP] Part 701: Calibration and measurement standards for contact (stylus) instruments
The measurement of the waviness can be done with a variety of instruments, including both surface finish profilometers and roundness instruments. The nature of these instruments is continually progressing and now includes both stylus-based contact instruments as well as optical & laser-based non-contact instruments.
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